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Descrizione
This volume concentrates on the process technology and device applications associated with micomachining and microfabrication. The handbook is intended primarily for industrial laboratories, universities and manufacturing facilities.
Micromachining and trends for the 21st century; wet chemical etching of silicon and SiO2; issues in dry etching; plating techniques; high aspect ratio processing; sensors and actuators; micro-optical devices; biomedical devices; smart materials, MEMs and electronics integration.
